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Fabrication of functional structures on thin silicon nitride membranes

✍ Scribed by P. Ekkels; R.W. Tjerkstra; G.J.M Krijnen; J.W. Berenschot; J. Brugger; M.C. Elwenspoek

Book ID
114155539
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
494 KB
Volume
67-68
Category
Article
ISSN
0167-9317

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## Abstract The fabrication and characterization of a metallized nanopore structure for the sensing of single molecules is described. Pores of varying diameters (>10 nm) are patterned into free‐standing silicon nitride membranes by electron‐beam lithography and reactive ion etching. Structural char