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Colloidal lithography-based fabrication of suspended nanoporous silicon nitride membranes

✍ Scribed by Zhang, Xuan ;Zhu, Zaiwen ;Sun, Chunfeng ;Zhu, Feng ;Luo, Zhongzi ;Yan, Jiawei ;Mao, Bingwei


Book ID
106197340
Publisher
Springer-Verlag
Year
2009
Weight
246 KB
Volume
167
Category
Article
ISSN
0344-838X

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## Abstract The fabrication and characterization of a metallized nanopore structure for the sensing of single molecules is described. Pores of varying diameters (>10 nm) are patterned into free‐standing silicon nitride membranes by electron‐beam lithography and reactive ion etching. Structural char