Fabrication of Metallized Nanopores in S
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Ruoshan Wei; Daniel Pedone; Andreas Zürner; Markus Döblinger; Ulrich Rant
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Article
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2010
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John Wiley and Sons
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English
⚖ 710 KB
## Abstract The fabrication and characterization of a metallized nanopore structure for the sensing of single molecules is described. Pores of varying diameters (>10 nm) are patterned into free‐standing silicon nitride membranes by electron‐beam lithography and reactive ion etching. Structural char