Ultra-dense hydrogen silsesquioxane (HSQ) structures on thin silicon nitride membranes

✍ Scribed by Sookyung Choi; Minjun Yan; Liang Wang; Ilesanmi Adesida

• Book ID: 104052198
• Publisher: Elsevier Science
• Year: 2009
• Tongue: English
• Weight: 459 KB
• Volume: 86
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2008.12.055