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Fabrication and electrical characterization of silicon nanowires based resistors

✍ Scribed by Ni, L; Demami, F; Rogel, R; Salaün, A C; Pichon, L


Book ID
127076204
Publisher
IOP Publishing
Year
2009
Weight
755 KB
Volume
6
Category
Article
ISSN
1757-8981

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## Abstract Ultra thin (8 nm) silicon nanowires have been fabricated by Atomic Force Microscopy (AFM) lithography on an insulator layer starting from Silicon On Insulator (SOI) substrates. Electrical measurements reveal a high sensitivity of the electron transport in these ultra thin wires to the c