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Experimental study of nanostructured silicon carbide film formation by hypersonic plasma particle deposition

✍ Scribed by J. Blum; A. Neuman; N. Tymiak; N.P. Rao; S.L. Girshick; J.V.R. Heberlein; W. Gerberich; P.H. McMurry

Book ID: 117131121
Publisher: Elsevier Science
Year: 1998
Tongue: English
Weight: 190 KB
Volume: 29
Category: Article
ISSN: 0021-8502
DOI: 10.1016/s0021-8502(98)00121-9

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