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Experimental shift allowance in the deconvolution of SIMS depth profiles

✍ Scribed by Yunin, Pavel Andreevich; Drozdov, Yurii Nikolaevich; Drozdov, Mikhail Nikolaevich

Book ID: 121191980
Publisher: John Wiley and Sons
Year: 2013
Tongue: English
Weight: 193 KB
Volume: 45
Category: Article
ISSN: 0142-2421
DOI: 10.1002/sia.5259

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## Abstract Delta‐doped structures represent a powerful class of test structures to investigate the experimental and fundamental factors limiting the depth resolution obtainable in SIMS sputter depth profiling. In this work, theoretical studies of the effects on the broadening of an Si delta spike