✦ LIBER ✦
Method for taking into account the shift parameter in the deconvolution of the depth composition distribution of semiconductor structures from SIMS depth profiles
✍ Scribed by P. A. Yunin, Yu. N. Drozdov, M. N. Drozdov, A. V. Novikov, D. V. Yurasov
- Book ID
- 120808659
- Publisher
- Springer
- Year
- 2012
- Tongue
- English
- Weight
- 188 KB
- Volume
- 46
- Category
- Article
- ISSN
- 1063-7826
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