Experimental evidence of TBD power-law for voltage dependence of oxide breakdown in ultrathin gate oxides

✍ Scribed by Wu, E.Y.; Vayshenker, A.; Nowak, E.; Sune, J.; Vollertsen, R.-P.; Lai, W.; Harmon, D.

• Book ID: 114616921
• Publisher: IEEE
• Year: 2002
• Tongue: English
• Weight: 509 KB
• Volume: 49
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/ted.2002.805606