✦ LIBER ✦

Excimer laser for lithography

Publisher: Elsevier Science
Year: 1982
Tongue: English
Weight: 114 KB
Volume: 4
Category: Article
ISSN: 0141-6359
DOI: 10.1016/0141-6359(82)90096-4

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

A negative resist for KrF excimer laser

A negative resist for KrF excimer laser lithography

✍ M. Toriumi; N. Hayashi; M. Hashimoto; S. Nonogaki; T. Ueno; T. Iwayanagi 📂 Article 📅 1989 🏛 Society for Plastic Engineers 🌐 English ⚖ 545 KB

Excimer laser projection lithography: Op

Excimer laser projection lithography: Optical considerations

✍ D.J. Ehrlich; M. Rothschild 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 248 KB

Excimer laser with high repetition rate

Excimer laser with high repetition rate for DUV lithography

✍ R. Pätzel; I. Bragin; J. Kleinschmidt; U. Rebhan; D. Basting 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 238 KB

Excimer lithography for ULSI

✍ A. Miyaji; K. Suzuki; A. Tanimoto 📂 Article 📅 1993 🏛 Springer 🌐 English ⚖ 779 KB

A brief review of excimer lithography for ULSI is presented with an emphasis on the recent progress made in KrF excimer stepper technology. In particular, the types of projection optics, excimer laser and the related performance of steppers are explained in detail. The resist patterns obtained with

Ultrafast deep UV lithography using exci

Ultrafast deep UV lithography using excimer lasers

✍ K. Jain; S. Rice; B. J. Lin 📂 Article 📅 1983 🏛 Society for Plastic Engineers 🌐 English ⚖ 264 KB

New KrF and ArF excimer laser for advanc

New KrF and ArF excimer laser for advanced DUV lithography

✍ H. Endert; R. Pa¨tzel; M. Powell; U. Rebhan; D. Basting 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 330 KB