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A negative resist for KrF excimer laser lithography

✍ Scribed by M. Toriumi; N. Hayashi; M. Hashimoto; S. Nonogaki; T. Ueno; T. Iwayanagi

Publisher: Society for Plastic Engineers
Year: 1989
Tongue: English
Weight: 545 KB
Volume: 29
Category: Article
ISSN: 0032-3888
DOI: 10.1002/pen.760291308

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