𝔖 Bobbio Scriptorium
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Excimer laser with high repetition rate for DUV lithography

✍ Scribed by R. Pätzel; I. Bragin; J. Kleinschmidt; U. Rebhan; D. Basting

Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
238 KB
Volume
30
Category
Article
ISSN
0167-9317

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## Abstract ## Background and Objective The goal of the present work is to assess whether bovine corneal ablations generated at laser repetition rates of up to 400 Hz are comparable to ablations performed at rates consistent with current clinical laser systems. ## Study Design/Materials and Metho