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Excimer laser-assisted etching of silicon in chlorine: adsorption and desorption

✍ Scribed by A.V. Kuzmichov

Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 385 KB
Volume: 86
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(94)00441-2

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