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Evolution of photoluminescent defect clusters in proton- and copper-implanted silicon crystals during annealing

✍ Scribed by Nakamura, Minoru; Murakami, Susumu

Book ID: 120080211
Publisher: American Institute of Physics
Year: 2003
Tongue: English
Weight: 344 KB
Volume: 94
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.1593801

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