Transformation of defect layer and zinc implant profile in silicon during thermal annealing

✍ Scribed by V. S. Kulikauskas, V. V. Saraikin, D. V. Roshchupkin, V. V. Privezentsev

• Book ID: 119884401
• Publisher: SP MAIK Nauka/Interperiodica
• Year: 2012
• Tongue: English
• Weight: 248 KB
• Volume: 57
• Category: Article
• ISSN: 1063-7745
• DOI: 10.1134/s1063774512070140