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Diffusion profiles and magnetic properties of Mn-implanted silicon after thermal annealing

✍ Scribed by Lee Chow; J. C. Gonzalez; E. Del Barco; R. Vanfleet; A. Misiuk; M. Prujszczyk; A. Shunmugavelu; G. Chai; J. Bak-Misiuk

Publisher: Springer US
Year: 2007
Tongue: English
Weight: 342 KB
Volume: 19
Category: Article
ISSN: 0957-4522
DOI: 10.1007/s10854-007-9481-4

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