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Defect structure transformation after thermal annealing in a surface layer of Zn-implanted Si(001) substrates

✍ Scribed by Shcherbachev, Kirill (author);Privezentsev, Vladimir (author);Kulikauskas, Vaclav (author);Zatekin, Vladimir (author);Saraykin, Vladimir (author)

Book ID: 120449805
Publisher: International Union of Crystallography
Year: 2013
Tongue: English
Weight: 900 KB
Volume: 46
Category: Article
ISSN: 0021-8898
DOI: 10.1107/S0021889813010169

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