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Evolution of mechanical strain and extended defects in annealed (1 0 0) silicon samples implanted with Ge+ ions

✍ Scribed by Yu. Suprun-Belevich; F. Cristiano; A. Nejim; P.L.F. Hemment; B.J. Sealy

Book ID
114169847
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
185 KB
Volume
140
Category
Article
ISSN
0168-583X

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