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Evaluation of the soft x-ray reflectivity of micropore optics using anisotropic wet etching of silicon wafers

✍ Scribed by Mitsuishi, Ikuyuki ;Ezoe, Yuichiro ;Koshiishi, Masaki ;Mita, Makoto ;Maeda, Yoshitomo ;Yamasaki, Noriko Y. ;Mitsuda, Kazuhisa ;Shirata, Takayuki ;Hayashi, Takayuki ;Takano, Takayuki ;Maeda, Ryutaro

Book ID: 115354966
Publisher: The Optical Society
Year: 2010
Tongue: English
Weight: 500 KB
Volume: 49
Category: Article
ISSN: 1559-128X
DOI: 10.1364/AO.49.001007

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