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Precise mask alignment to the crystallographic orientation of silicon wafers using wet anisotropic etching

✍ Scribed by Vangbo, Mattias; Bäcklund, Ylva

Book ID: 120328349
Publisher: Institute of Physics
Year: 1996
Tongue: English
Weight: 441 KB
Volume: 6
Category: Article
ISSN: 0960-1317
DOI: 10.1088/0960-1317/6/2/011

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