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[IEEE 2002 2nd IEEE Conference on Nanotechnology - Washington, DC, USA (26-28 Aug. 2002)] Proceedings of the 2nd IEEE Conference on Nanotechnology - Fabrication of ultrahigh-density nano-pyramid arrays (NPAs) on [100] silicon wafer using scanning probe lithography and anisotropic wet etching

โœ Scribed by Sheu, J.T.; Yeh, S.P.; Wu, C.H.; You, K.S.


Book ID
126713898
Publisher
IEEE
Year
2002
Weight
369 KB
Category
Article
ISBN-13
9780780375383

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