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Etching of silicon by SF6 induced by ion bombardment

✍ Scribed by D.J. Oostra; A. Haring; A.E. De Vries; F.H.M. Sanders; G.N.A. Van Veen

Book ID: 113277950
Publisher: Elsevier Science
Year: 1986
Tongue: English
Weight: 538 KB
Volume: 13
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(86)90565-3

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