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Electron-induced etching of silicon by SF6

✍ Scribed by D.J. Oostra; A. Haring; A.E. De Vries

Book ID: 113277509
Publisher: Elsevier Science
Year: 1986
Tongue: English
Weight: 535 KB
Volume: 16
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(86)90097-2

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