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Epitaxial growth of rutile films on Si(100) substrates by thermal oxidation of evaporated titanium films in argon flux

✍ Scribed by Dai, Z; Naramoto, H; Narumi, K; Yamaoto, S

Book ID
121379500
Publisher
Institute of Physics
Year
1999
Tongue
English
Weight
114 KB
Volume
11
Category
Article
ISSN
0953-8984

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