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Epitaxial growth of titanium oxide thin films on MgO(100) single-crystal substrates by reactive deposition methods

✍ Scribed by Fumikazu Imai; Kimio Kunimori; Takaaki Manabe; Toshiya Kumagai; Hisakazu Nozoye

Book ID
108389196
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
865 KB
Volume
310
Category
Article
ISSN
0040-6090

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MgO thin films have been grown on Si 100 substrates at low temperatures of 500-8508C by metal-organic molecular Ε½ . beam epitaxy MOMBE using the solid precursor magnesium acetylacetonate. Oxygen plasma is required to achieve Ε½ . deposition. The composition of the films was determined by Auger electr