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Epitaxial growth of in situ doped silicon by LPCVD

✍ Scribed by C Domínguez; G Pastor; E Domínguez

Publisher: Elsevier Science
Year: 1987
Tongue: English
Weight: 283 KB
Volume: 37
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(87)90322-8

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