Epitaxial growth of in situ doped silicon by LPCVD : C. Domingues, G. Pastor and E. Dominguez. Vacuum37, 407 (1987)

• Publisher: Elsevier Science
• Year: 1988
• Tongue: English
• Weight: 112 KB
• Volume: 28
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(88)90102-3