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A Thorough Reconsideration of in-situ Doping Theory of Epitaxial Silicon Layers

✍ Scribed by Dr. sc. H. Kühne

Publisher: John Wiley and Sons
Year: 1992
Tongue: English
Weight: 375 KB
Volume: 27
Category: Article
ISSN: 0232-1300
DOI: 10.1002/crat.2170270705

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