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Suppression of epitaxial silicon layer doping with boron in the presence of hydrogen chloride

✍ Scribed by Th. Morgenstern; Dr. H. Kühne; G. A. Kokovin; N. A. Testova; A. A. Titov


Publisher
John Wiley and Sons
Year
1987
Tongue
English
Weight
460 KB
Volume
22
Category
Article
ISSN
0232-1300

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