Incorporation concentration dependence of phosphorus in the deposition of silicon epitaxial layers from silane-phosphine-hydrogen mixtures

✍ Scribed by H. Kühne

• Publisher: John Wiley and Sons
• Year: 1979
• Tongue: English
• Weight: 467 KB
• Volume: 14
• Category: Article
• ISSN: 0232-1300
• DOI: 10.1002/crat.19790140315