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Epitaxial Growth of AlN Layers on SiC Substrates in a Hot-Wall MOCVD System

✍ Scribed by A. Kakanakova-Georgieva; P.O.Å. Persson; U. Forsberg; J. Birch; L. Hultman; E. Janzén

No coin nor oath required. For personal study only.

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