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Enhancement of barrier properties of aluminum oxide layer by optimization of plasma-enhanced atomic layer deposition process

✍ Scribed by Lee, Jong Geol; Kim, Hyun Gi; Kim, Sung Soo

Book ID: 123558036
Publisher: Elsevier Science
Year: 2013
Tongue: English
Weight: 872 KB
Volume: 534
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2013.02.125

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