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Enhanced luminescence from GaN-based blue LEDs grown on grooved sapphire substrates

✍ Scribed by Z.H. Feng; K.M. Lau


Book ID
115463469
Publisher
IEEE
Year
2005
Tongue
English
Weight
263 KB
Volume
17
Category
Article
ISSN
1041-1135

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## Abstract Sapphire substrates were nanopatterned by dry (inductively coupled plasma, ICP) etching to improve the performance of GaN‐based light‐emitting diodes (LEDs). GaN‐based LEDs on nanopatterned sapphire substrates (NPSS) were fabricated by metal organic chemical vapor deposition (MOCVD). Th