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Analyses of light extraction efficiency in GaN-based LEDs grown on patterned sapphire substrates

✍ Scribed by Chenglong Xu; Tongjun Yu; Jian Yan; Zhiyuan Yang; Xingbin Li; Yuebin Tao; Xingxing Fu; Zhizhong Chen; Guoyi Zhang


Book ID
112182290
Publisher
John Wiley and Sons
Year
2011
Tongue
English
Weight
317 KB
Volume
9
Category
Article
ISSN
1862-6351

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## Abstract Sapphire substrates were nanopatterned by dry (inductively coupled plasma, ICP) etching to improve the performance of GaN‐based light‐emitting diodes (LEDs). GaN‐based LEDs on nanopatterned sapphire substrates (NPSS) were fabricated by metal organic chemical vapor deposition (MOCVD). Th