Nanoanalysis by a high-resolution energy
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Masanori Mitome; Yoshio Bando; Dmitri Golberg; Keiji Kurashima; Yoshihiro Okura;
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Article
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2004
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John Wiley and Sons
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English
β 761 KB
An energy-filtering transmission electron microscope with 300 kV acceleration voltage was developed and the spatial resolution of elemental distribution images was improved. Observing oxygen monolayers in Al 11 O 3 N 9 , it was shown that the actual resolution attained is up to 0.5 nm. Surface plasm