Nanoanalysis by a high-resolution energy filtering transmission electron microscope

✍ Scribed by Masanori Mitome; Yoshio Bando; Dmitri Golberg; Keiji Kurashima; Yoshihiro Okura; Toshikatsu Kaneyama; Mikio Naruse; Yoshiaki Honda

• Publisher: John Wiley and Sons
• Year: 2004
• Tongue: English
• Weight: 761 KB
• Volume: 63
• Category: Article
• ISSN: 1059-910X
• DOI: 10.1002/jemt.20025

✦ Synopsis

An energy-filtering transmission electron microscope with 300 kV acceleration voltage was developed and the spatial resolution of elemental distribution images was improved. Observing oxygen monolayers in Al 11 O 3 N 9 , it was shown that the actual resolution attained is up to 0.5 nm. Surface plasmon loss images of silver particles were taken with a resolution of better than 0.4 nm. Furthermore, the sensitivity is sufficiently high to distinguish indium content differences of 2.5 atomic percent in In x Al 1-x As. This performance is good enough to analyze elemental distribution with atomic-level resolution. Furthermore, since analysis with the energyfiltering microscope is easy and practical, nanoanalysis may come into wide use not only in academic fields but also in industry.