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Energy deposition functions in electron resist films on substrates

✍ Scribed by Parikh, Mihir; Kyser, David F.

Book ID: 121311156
Publisher: American Institute of Physics
Year: 1979
Tongue: English
Weight: 808 KB
Volume: 50
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.326088

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