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Calculation of energy deposition in thin resist films over multilayer substrates

✍ Scribed by I. Raptis; N. Glezos; A. Rosenbusch; G. Patsis; P. Argitis

Book ID: 114155764
Publisher: Elsevier Science
Year: 1998
Tongue: English
Weight: 262 KB
Volume: 41-42
Category: Article
ISSN: 0167-9317
DOI: 10.1016/s0167-9317(98)00038-0

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