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Use of the Boltzmann transport equation for the evaluation of energy deposition in the case of electron sensitive resist films over composite substrates

✍ Scribed by I. Raptis; N. Glezos; M. Hatzakis

Book ID: 103598958
Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 241 KB
Volume: 21
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(93)90075-g

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