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Energetic spectra of dislocation networks produced by hydrophilic bonding of silicon wafers

✍ Scribed by Kolevatov, I.; Trushin, M.; Vyvenko, O.; Kittler, M.; Kononchuk, O.

Book ID: 118766634
Publisher: John Wiley and Sons
Year: 2012
Tongue: English
Weight: 591 KB
Volume: 10
Category: Article
ISSN: 1862-6351
DOI: 10.1002/pssc.201200396

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