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Impact of hydrogen on electrical levels and luminescence of dislocation network at the interface of hydrophilically bonded silicon wafers

✍ Scribed by Loshachenko, Anton; Bondarenko, Anton; Vyvenko, Oleg; Kononchuk, Oleg

Book ID: 118766642
Publisher: John Wiley and Sons
Year: 2012
Tongue: English
Weight: 244 KB
Volume: 10
Category: Article
ISSN: 1862-6351
DOI: 10.1002/pssc.201200414

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