Embedded epitaxial growth of 4H-SiC on trenched substrates and pn junction characteristics

✍ Scribed by Y. Negoro; T. Kimoto; M. Kataoka; Y. Takeuchi; R.K. Malhan; H. Matsunami

• Book ID: 104050430
• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 187 KB
• Volume: 83
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2005.10.018