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Electronic and crystalline structure of Si/SiO2 interface modified by ArF excimer laser

✍ Scribed by V. Cháb; I. Lukeš; M. Ondřejček; P. Jiříček


Book ID
107880284
Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
146 KB
Volume
35
Category
Article
ISSN
0079-6816

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