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ArF excimer laser induced changes in the Si(100)/SiO2 interface studied in situ by ESCA and LEED

✍ Scribed by J. Kubátová; V. Cháb; I. Lukeš; P. Jiříček; F. Fendrych


Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
239 KB
Volume
43
Category
Article
ISSN
0169-4332

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