Defect formation and structural alternation in modified SiO[sub 2] glasses by irradiation with F[sub 2] laser or ArF excimer laser

✍ Scribed by Ikuta, Yoshiaki; Kikugawa, Shinya; Hirano, Masahiro; Hosono, Hideo

• Book ID: 126780849
• Publisher: AVS (American Vacuum Society)
• Year: 2000
• Tongue: English
• Weight: 353 KB
• Volume: 18
• Category: Article
• ISSN: 0734-211X
• DOI: 10.1116/1.1328055