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Electron-Trap and Hole-Trap Distributions in Metal/Oxide/Nitride/Oxide/Silicon Structures

✍ Scribed by Ishida, Takeshi; Mine, Toshiyuki; Hisamoto, Digh; Shimamoto, Yasuhiro; Yamada, Ren-ichi


Book ID
124086010
Publisher
IEEE
Year
2013
Tongue
English
Weight
632 KB
Volume
60
Category
Article
ISSN
0018-9383

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From experiments on photoluminescence in Si 3 N 4 the polaron energy of 1.4 eV was determined. This value is in agreement with the energy of thermal ionization determined from electron and hole transport. Quantum-chemical simulation showed that Si-Si bond is able to capture holes and electrons in Si