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Electron cyclotron resonance plasma-assisted pulsed laser deposition of boron carbon nitride films

✍ Scribed by Ling, H; Wu, J.D; Sun, J; Shi, W; Ying, Z.F; Li, F.M

Book ID: 123329018
Publisher: Elsevier Science
Year: 2002
Tongue: English
Weight: 117 KB
Volume: 11
Category: Article
ISSN: 0925-9635
DOI: 10.1016/S0925-9635(02)00047-X

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