Deposition of carbon nitride films using an electron cyclotron wave resonance plasma source

✍ Scribed by Rodil, S.; Morrison, N.A.; Milne, W.I.; Robertson, J.; Stolojan, V.; Jayawardane, D.N.

• Book ID: 122540479
• Publisher: Elsevier Science
• Year: 2000
• Tongue: English
• Weight: 155 KB
• Volume: 9
• Category: Article
• ISSN: 0925-9635
• DOI: 10.1016/S0925-9635(99)00345-3