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Electron cyclotron resonance plasma deposition of cubic boron nitride using N-trimethylborazine

✍ Scribed by A. Weber; U. Bringmann; R. Nikulski; C.-P. Klages

Book ID: 107930272
Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 468 KB
Volume: 60
Category: Article
ISSN: 0257-8972
DOI: 10.1016/0257-8972(93)90139-f

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