✦ LIBER ✦

Electron cyclotron resonance light source assembly—A vacuum-ultraviolet radiation source based on an electron cyclotron resonance plasma

✍ Scribed by P. Grübling; J. Hollandt; G. Ulm

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

An electron cyclotron resonance plasma s

✍ G. Lorenz; P. Baumann; G. Castrischer; I. Kessler; K.-H. Kretschmer; B. Dumbache 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 651 KB

Extreme-ultraviolet source based on the

✍ A. V. Vodopyanov; S. V. Golubev; D. A. Mansfeld; A. G. Nikolaev; K. P. Savkin; N 📂 Article 📅 2008 🏛 SP MAIK Nauka/Interperiodica 🌐 English ⚖ 169 KB

Experiments on a 14.5 GHz electron cyclo

✍ Hill, C. E.; Langbein, K. 📂 Article 📅 1998 🏛 American Institute of Physics 🌐 English ⚖ 349 KB

Ion and neutral energies in a multipolar

✍ G. King 📂 Article 📅 1992 🏛 AVS (American Vacuum Society) 🌐 English ⚖ 607 KB

Thermalization of sputtered aluminium at

✍ Poluektov, N P; Kharchenko, V N; Kamyschov, I A 📂 Article 📅 2003 🏛 Institute of Physics 🌐 English ⚖ 334 KB

Cu deposition using a permanent magnet e

✍ Lee A. Berry; S.M. Gorbatkin; R.L. Rhoades 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 377 KB